WFE

RF-MEMS for Single Line-Up Front-End modules A.J.M. de Graauw and P.G. Steeneken Th.G.S.M. Rijks, J.T.M. van Beek, M. Ulenaers, P. van Eerd, J. den Toonder, A. van Dijken, F. van Straten, A. van Bezooijen, A. den Dekker, W. Weekamp, J. Scheer and C. Slob

Philips Semiconductors, Nijmegen Philips Research, Eindhoven The Netherlands 1

Outline • Single Line-Up FEM concept • High Efficiency amplifier operation • Band and Load-switching • High Efficiency dualband GSM amplifier • Requirements on RF MEMS • PASSITM MEMS process • Power and voltage handling • Speed and reliability • Conclusions 2

Trends in RF Front-End modules

• Convergence to Multi-Band / Mode RF-pipes. 3

Single Line-Up FEM concept TX:

TX:

F1

F1,F2…Fn

F2 Fn

RX: F1, F2…Fn RX: F1, F2…Fn

n-amplifier line-up's

1-amplifier line-up

n-fixed output matches

1-variable output match

fixed loadline

variable loadline

• Re-use of PA-stages and matching networks saves cost&size. • Concept demonstrator GSM FEM: F1=0.9GHz, F2=1.8GHz. 4

High Efficiency amplifier operation Vcc 3V

RL_fund = (π.Vcc)2 /(8.Pc) ≈ 3Ω RL_Heven = ∞ RL_Hodd = 0 36dBm

50Ω

• High power efficiency requires optimum load impedance levels at fundamental- and harmonic-frequencies. (Inverse class-F) 5

Fundamental Load Impedance RL [Ω]

PAE [%]

PL [dBm]

12Ω 6Ω

3Ω

PL [dBm]

• Optimum impedance doubles for every 3dB power reduction.

• Loadline switching improves efficiency at reduced power levels. 6

Inverse class-F approximations U [V]

I U [A] [V]

t [ns] n → ∞: PAE=100% n = 3:

I [A]

t [ns] n = 3,GaAs HBT: PAE≈ 80%

PAE≈ 90%

• Proper termination up to H3 is sufficient for high efficiency. 7

Frequency Band Switching

re-configurable network

L> C> 0.9GHz: low order

L< C< 1.8GHz: high order

• Bandswitching with variable C and fixed L by switching topology. 8

Frequency Band switching

lowband: n=2

highband: n=4

• Maximize bandwidth by design for equal Q per section.

• Qlowband and Qhighband are coupled. 9

Load switching Zlow Zhigh

ZL C2

L1

L2 C2

C1

• Use of variable shunt capacitance to control real part of ZL. 10

High Efficiency Dualband GSM Amplifier Vcc

Con < 10pF α=Con/Coff < 10

RL

Vload_switch Vband_switch

State / ZL

Vload_switch

Vband_switch

LB_33dBm / 3Ω

1

1

LB_30dBm / 6Ω

0

1

HB_30dBm/ 4Ω

0

0 11

Efficiency Characteristics PAE_FEM [%] Lowband_LS

Lowband

Highband

PL [dBm] 12

Efficiency versus MEMS CAP ESR PAE_FEM [%]

ESR [Ω] • ESR is critical in low impedance applications. • MEMS technologies allow ESR numbers in the 0.2Ω area.

13

MEMS CAP Current and Voltage levels I [A]

U [V]

Low Z: High current

t [ns]

High Z: High voltage

t [ns]

• Irf_rms ≈ 1…2A (50Ω…mismatch) • Vrf_rms ≈ 10…20V (50Ω…mismatch) 14

Switch demands for single line-up FEM • Low cost • Capacitance switching ratio =Con/Coff>10 • Low loss: ESR<200 m • RF current handling ~2 A in closed state • RF voltage handling Vrms= ~20 V • Switching time < 100 s • Reliability >109 switches • Linearity

Capacitive RF MEMS switches are one of the most promising technologies to meet these demands 15

Low cost PASSITM MEMS process aluminum aluminum

passivation passivation

silicon silicon oxide dioxide

Industrialized PASSI process for passives on Si: silicon silicon nitride nitride

• Capacitors • Inductors

High-ohmic silicon

• MEMS switches and tunable capacitors.

Moveable electrode (aluminum alloy)

PASSITM MEMS

silicon oxide as sacrificial layer

silicon nitride as dielectric layer

High-ohmic silicon

16

RF MEMS series switch RF in bottom electrode

spring anchor

RF out

RF out suspended top electrode RF out

17

Implementation of RF MEMS CMEMS

VRF R Vact

Cdec. Interconnect

L

PASSITM MEMS die CMEMS

Vact

VRF PASSITM

die

L

Cdecoupling

R

ground

18

Switching ratio VRF CMEMS Cdecoupling

Vact

Decoupling capacitor reduces switching ratio

• Switching ratio =Con/Coff=20 • Cdecoupling≈2 CMEMS,on •

MEMS+dec.=Con/Coff=(

+1/2)/(1+1/2)=13.7 19

Current handling Issues:

• RF losses ‘ efficiency reduction • Heating ‘ deformations Solutions: • Minimize ESR

1 A ‘ Tmax=86 °C

‘ ~0.5 m in-plane deformation T

• Thick metal • Wide,short&many springs

‘ ESR <500 m

at 3 GHz, Rdc<100 m

• Multiple switches in parallel • Reduce temperature sensitivity • Temperature stable design 20

Temperature stable design dy~0.5 m • Spring designs reduce out-of-plane movement as a result of heating from RF or external power. • Springs occupy minimal space.

Color shows deflection 21 (2004) see Nieminen et al., J.MEMS p. 705

Voltage handling • Vrms can reach about 20 V • VPI must be much larger than VRF,rms to prevent RF pull-in + large VPI increases speed! • Vbd>80 V breakdown voltage of dielectric • VPI=30 V | DC-DC converter required

Philips DC-DC converter for MEMS Vout:Vin=35 V:2.8 V PDC-DC= 400 nJ/switch + 110 W standby 22

Switching speed • High actuation voltage (31 V) for sufficient speed (<100 s). • Bipolar actuation reduces charging, but difficult to implement.

Series switch

Vactž31 V 1 kHz

topen=80 s tclose=50 s

• Optimize squeeze film gas damping by design for sufficiently fast settling (see Steeneken et al., J. Micromech. Microeng. 15 (2005) p. 176).

Frf=1 GHz 23 P=1 atm.

Reliability Black: after 25x103 switch cycles (10 minutes@40 Hz). Red:

after 230x106 switch cycles (~40 hours@1600-2500 Hz)

charging main issue

Probe frequency:1 GHz, Vact=32 V

24

Conclusions • Single-Line Up FEM concept can reduce cost and size and improve performance of multiband/multimode Front-End modules. • Concept can be implemented with MEMS switched capacitors: – Only 4 MEMS required for dualband operation – Improved efficiency by applying load-switching • Philips MEMS technology is attractive for this concept: – Derived from low cost PASSITM process. – Designed for low loss, high current&voltage handling. – Sufficient switching time and reliability. – MEMS concept promises high linearity. 25

RF-MEMS for Single Line-Up Front-End modules

Speed and reliability. • Conclusions ... Re-use of PA-stages and matching networks saves cost&size. • Concept demonstrator ... 1-variable output match variable ...

3MB Sizes 1 Downloads 225 Views

Recommend Documents

Lineup Template.pdf
... was a problem previewing this document. Retrying... Download. Connect more apps... Try one of the apps below to open or edit this item. Lineup Template.pdf.

Uses for Modules - GitHub
In this article, I will walk you through several practical examples of what modules can be used for, ranging from ... that is not the case. Ruby would apply the definitions of Document one after the other, with whatever file was required last taking

Pfff, a PHP frontend
Page 1. Pfff, a PHP frontend. Yoann Padioleau [email protected]. February 14, 2010. Page 2. Copyright cс 2009-2010 Facebook. Permission is ...

TRAINABLE FRONTEND FOR ROBUST AND ... - Research
Google, Mountain View, USA. {yxwang,getreuer,thadh,dicklyon,rif}@google.com .... smoother M, PCEN can be easily expressed as matrix operations,.

Storage Frontend Postmortem Services
Oct 19, 2017 - Google's storage frontend service (“storage FE”) handles all customer read/write requests for binary objects for the ... Cloud customer JaneCorp uses Cloud Blob as a backend for their JaneApp application. This ... Customer app Jane

Title: RF Frontend -
If RFFE_CLK supplied, omit C26 C27 X4. C26 C27 X4 only if layout allows as option for inexpensive local clock with worse phase noise. Clock Build Options.

Lit Lineup 2017 Printable.pdf
Whoops! There was a problem loading more pages. Retrying... Lit Lineup 2017 Printable.pdf. Lit Lineup 2017 Printable.pdf. Open. Extract. Open with. Sign In.

Compilers: Backend to Frontend - GitHub
Sep 17, 2006 - Line 3 says that the label scheme_entry should be considered a ...... Figure 1.10: One way of implementing proper tail calls is by collapsing.

Frontend-Intern-Atameo.pdf
Page 1 of 1. Frontend-Intern-Atameo.pdf. Frontend-Intern-Atameo.pdf. Open. Extract. Open with. Sign In. Main menu. Displaying Frontend-Intern-Atameo.pdf.

Writing Perl Modules for CPAN
further by creating your own reusable Perl modules. Chapter 2 will teach .... The master server was set up at FUNet, where ...... print "My favorite cafe is $cafe\n";.

TRAINABLE FRONTEND FOR ROBUST AND ... - Research at Google
tion, we introduce a novel frontend called per-channel energy nor- malization (PCEN). ... In this section, we introduce the PCEN frontend as an alternative to the log-mel .... ing background noises and reverberations, where the noise sources.

ulrich modules
Ulrich ideal, then I/Q is a free A/I–module with rankA/I I/Q = µA(I) − d. Therefore, when A ... AMS 2000 Mathematics Subject Classification: 13H10, 13H15, 13A30.

F-ing modules
Aug 23, 2014 - Max Planck Institute for Software Systems (MPI-SWS) ... their support for hierarchical namespace management (via structures), a fine-grained va- .... In particular, unlike earlier unifying accounts of ML modules (Dreyer et al.,.

react-frontend-at-strv-jirikomon.pdf
Connect more apps... Try one of the apps below to open or edit this item. react-frontend-at-strv-jirikomon.pdf. react-frontend-at-strv-jirikomon.pdf. Open. Extract.

F-ing modules
Aug 23, 2014 - We assume a standard left-to-right call-by-value dynamic semantics, which ...... The rules for functor applications (M-APP) and sealed modules ...

printable comcast channel lineup filetype pdf
Si puedes definir. el odio o el amor. Amigo que desilusión. No todo es blanco,. O negro: es gris. Todo depende del matiz,. Busca y aprende a distinguir. La luna puede calentar. Whoops! There was a problem loading this page. printable comcast channel

Hostel facilities for single women.PDF
3-rFor this purpbse the Zonal,Rdilways may earrnark appro$i:lat€ nHmber of Staff quarters. without resorting to new constructiofis at appiopriate locationi and ...

Revised Training Modules for Human Resource.PDF
There was a problem previewing this document. Retrying... Download. Connect more apps... Try one of the apps below to open or edit this item. Revised Training Modules for Human Resource.PDF. Revised Training Modules for Human Resource.PDF. Open. Extr

Data security method and device for computer modules
Oct 6, 2006 - (45) Date of Reissued Patent: US RE43,171 E ..... “Component House: Design Technology for 'PCs in a snap'iNeoSystems Offers ..... for Performance,” Sixth Edition, Pearson Education, Inc., 2003, pp. 69-89. Hill, Goff (editor) ...

A Comparison of Training Modules for Administrative ...
obtain address characteristics of residences (such as the type of housing unit). Finally, the dataset is then linked with administrative records using MAFID and PIK variables. 3.3 American Community Survey. We use the 2014 American Community Survey (

psychology modules for active learning 11th edition pdf
psychology modules for active learning 11th edition pdf. psychology modules for active learning 11th edition pdf. Open. Extract. Open with. Sign In. Main menu.