USO0RE42899E

(19) United States (12) Reissued Patent

(10) Patent Number: US RE42,899 E (45) Date of Reissued Patent: Nov. 8, 2011

Coulombe et a]. (54)

METHOD AND SYSTEM FOR MEASURING

(56)

References Cited

THE RELIEF OF AN OBJECT U.S. PATENT DOCUMENTS

(75) Inventors: Alain Coulombe, Brossard (CA); Michel Cantin, Saint-Lambert (CA); Alexandre Nikitine, Montreal (CA)

3,821,558 3,943,278 4,051,483 4,053,234

(73) Assignee: Zygo Corporation, Middle?eld (*)

Notice:

11/581,230

(22)

PCT Filed:

Jul. 14, 2000

(86)

PCT No.:

PCT/CA00/00834

6/1974 3/1976 9/1977 10/1977

4,068,955 A

Mans?eld Ramsey, Jr. Suzuki McFarlane

1/1978 Bodlaj

(Continued)

This patent is subject to a terminal dis claimer.

(21) Appl. No.:

A A A A

FOREIGN PATENT DOCUMENTS EP

0182469

*

5/1996

(Continued) Primary Examiner * HWa Lee

§ 371 (0)0)’ (2), (4) Date: (87)

(74) Attorney,

Apr. 23, 2002

(57)

PCT Pub. No.: WO01/06210

&

Parr

ABSTRACT

for projecting a grid, an image acquisition apparatus that

Related US. Patent Documents

includes a camera, and a computer. Providing a reference

object having common elements With the object to measure, the method includes the steps of a) positioning the grid at

Reissue of:

(30)

or FirmiBereskin

A method and a system for measuring the relief of an object are described herein. The system includes a grid projecting

PCT Pub. Date: Jan. 25, 2001

(64) Patent No.: Issued: Appl. No.: Filed:

Agent,

LLP/S.E.N.C.R.L., s.r.l.

7,023,559 Apr. 4, 2006 10/031,031 Apr. 23, 2002

three different known positions relative to the camera and the

common elements; b) for each position of the grid, projecting the grid unto the reference object and, With the camera, taking an image of the reference object to yield three images having

Foreign Application Priority Data

values for each pixel of the camera and c) computing the

reference object phase for each pixel using the three reference Jul. 14, 1999

(51)

Int. Cl. G01B 9/02

(CA) .................................... .. 2277855

object intensity values for the corresponding pixel. Steps a), b) and c) are repeated by replacing the reference object by the object to be measured. The difference of height between the object to be measured and the reference object for each pixel

(2006.01)

(52)

US. Cl. ..................................................... .. 356/511

(58)

Field of Classi?cation Search ................ .. 356/457,

are then computed by subtracting the reference object phase and the object phase for the corresponding pixel.

356/511, 512, 605, 610 See application ?le for complete search history.

17 Claims, 15 Drawing Sheets

——>

E<—A¢: Phase Modulation

60

Grid Projection

A

To Camera

0: Projection Angle

Object Reference Surface

H

p: Grid Pitch

US RE42,899 E Page 2 US. PATENT DOCUMENTS 4,192,612 A M980 Bodlaj . . 4,301,373 A 11/1981 SJOdln 4,456,379 A

4,525,858 A 4,634,281 A

6/1984 Schumann et a1. . 6/1985 Cl1ne e161. . 1/1987 Elkmeyer .

4,657,394 A

4/1987 1161161111

4,736,108 A

4/1988 Comstocket a1.

4,742,237 A

5/1988 OZaWa

4,743,769 A

5/1988

4,803,371 A 4,939,380 A

2/1989 Durland 7/1990 Berger et 31.

4,959,898 A 4,962,569 A 5,085,502 A

5,133,601 A 5,175,601 A

Schwaiger et a1.

7/1992 C_ohen et a1. 12/1992 F1tts

5,177,564 A

1/1993

5,307,151 A

4/1994 116161111.

5,319,445 A 5,327,082 A 5,396,332 A

6/1994 F1tts 7/1994 Gabura 6161. 3/1995 ClsZek

5,442,573 A 5,473,432 A 5 647 588 A

8/1995 Bredberg et a1. 12/1995 Sonn 7/1997 Stauber et a1





'

FOREIGN PATENT DOCUMENTS

10/1990 Landman 6161. 10/1990 HOSel

GB W0

2204 397 A WO 88/02847

2/1992 Womacketal.

W0

WO 98/55826

5,102,224 A

4/1992 Uesugiet a1.

5,120,966 A

6/ 1992 Kondo

K211061211.

_

_

* c1ted by examlner

*

11/1988 4/1988 12/1998

US. Patent

Nov. 8, 2011

Sheet 1 0f 15

US RE42,899 E

1] 10

V

\

GRID

PROJECTING

IMAGE :CQUISJIUN

\ STORING DEVICE <—->

j” COMPUTER

<——-—

I INPUT DEVICE

OUTPUT DEVICE ‘f 18

El

US. Patent

Nov. 8, 2011

Sheet 2 0f 15

US RE42,899 E

12

11

US. Patent

Nov. 8, 2011

Sheet 3 0f 15

US RE42,899 E

<—A¢: Phase Modulation 60

Grid Projection

‘ kTo Camera

60

6: Projection Angle

Object Reference Surface <—>

fx

p: Grid PLtch

E5

US. Patent

Nov. 8, 2011

Sheet 4 0f 15

US RE42,899 E

100

POSITIONING THE GRID AT A FIRST POSITION ,) RELATIVE TO A REFERENCE OBJECT ‘

102

PROJECTING THE GRID 0N,/ THE REFERENCE OBJECT

I

104

TAKING WITH THE CAMERA AN IMAGE OF —/ THE REFERENCE OBJECT TO GATHER AN INTENSITY VALUE FOR EACH PIXEL OF THE IMAGE

REPEATING STEPS 100 TO 104 AT LEAST TWO ,/ TIMES WITH THE GRID POSITIONED AT TWO NEW DIFFERENT KNOWN POSITIONS TO YIELD AT LEAST THREE INTENSITY VALUES FOR EACH PIXEL COMPUTING THE PHASE FOR EACH PIXEL USING THE THREE INTENSITY VALUES

—J

I

110

REPEATING STEPS 100 TO 108 BY REPLACING THE d

REFERENCE OBJECT WITH THE OBJECT TO BE MEASURED 112

COMPUTING FOR EACH PIXEL THE DIFFERENCE ,/ OF HEIGHT BETWEEN THE OBJECT AND THE REFERENCE OBJECT BY USING THE RESPECTING PHASES THEREOF FOR EVERY PIXEL 114

DETERMINING THE RELIEF OF THE OBJECT FOR // EACH PIXEL USING THE DIFFERENCE OF HEIGHT AT EVERY PIXEL

E4

US. Patent

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62 64

E5

66

U S. Patent

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5.k3.,.»

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-5

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US RE42,899 E

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69 70

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US RE42,899 E

US RE42,899 E 1

2 The Projected Moiré technique is very similar to the

METHOD AND SYSTEM FOR MEASURING THE RELIEF OF AN OBJECT

Shadow Moiré technique since the grid, positioned between the camera and the object, has a function similar to the

shadow of the grid in the Shadow Moiré technique. However,

Matter enclosed in heavy brackets [ ] appears in the original patent but forms no part of this reissue speci?ca

a drawback of the Projected Moiré technique is that it involves many adjustments and therefore creates more risk of

tion; matter printed in italics indicates the additions made by reissue.

inaccuracy in the results since it requires the positioning and tracking of two grids. Furthermore, the second grid tend to obscure the camera, preventing it from being used simulta neously to take other measurements.

FIELD OF THE INVENTION

A method and a system to measure the relief of an object

The present invention generally relates to methods for measuring the relief of an object. More speci?cally, the present invention is concerned with the use of such systems and methods to inspect the lead coplanarity on circuit board.

free of the above-mentioned drawbacks of the prior-art are thus desirable.

BACKGROUND OF THE INVENTION

An object of the present invention is therefore to provide an improved method and system for measuring the relief of an

OBJECTS OF THE INVENTION

The use of interferometric methods to inspect the surface of an object for defects or to measure the relief of an object is

well known. Generally stated, these methods consist in gen erating an interferometric pattern on the surface of the object

object. 20

and then analyzing the resulting interferometric image (or

SUMMARY OF THE INVENTION

interfero gram) to obtain the relief of the object. The interfero metric image generally includes a series of black and white

fringes.

25

Interferometric methods that require the use of a laser to generate the interferometric pattern are called “classic inter ferometric methods”. In such classic methods, the wave

a) projecting a grid on a reference object; the grid being located at a ?rst position relative to the camera and to the 30

tions beyond 0.5-1 pm when they are implemented in the visible spectrum. Indeed, the density of the black and white

illuminated by the projected grid; the image of the ref erence object having intensity values for each pixel; c) repeating steps a) and b) at least two times with the grid 35

d) computing the reference object phase for each pixel

analysis to be tedious. Another drawback of classic interferometric methods is

using the at least three reference object intensity values 40

sensitive to noise and vibrations.

45

of the frequency beats obtained between 1) a grid positioned

h) computing the object phase for each pixel position using the at least three object intensity values for the corre 50

interferogram (“Projected Moiré Techniques”). In both cases, the frequency beats between two grids produce the fringes of

ence object phase and the object phase for the corre

sponding pixel. 55

a grid projecting assembly; 60

an image acquisition apparatus including a camera pro vided with an array of pixels; a computer con?gured for

a) receiving from the image acquisition apparatus at least three images of the projected grid onto the object

A drawback to the use of a Shadow Moiré technique for

assembly.

According to another aspect of the present invention, there is provided a system for measuring the relief of an object, the

system comprising:

the interferogram. This variation in the pattern can then be analysed to obtain the relief of the object.

results, causing restrictions in the set-up of the measuring

sponding pixel; and i) computing the difference of height between the object and the reference object for each pixel using the refer

the resulting interferogram.

measuring the relief of an object is that the grid must be positioned very close to the object in order to yield accurate

g) repeating steps e) and f) at least two times with the grid least three intensity values for each pixel;

(“Shadow Moiré Techniques”) or 2) the projection of a grid on the object and another grid positioned between the object

More speci?cally, the Shadow Moiré technique includes the steps of positioning a grid near the object to be measured, providing illumination from a ?rst angle from the plane of the object (for example 45 degrees) and using a camera, posi tioned at a second angle (for example 90 degrees from the plane of the object), to take pictures of the interferogram. Since the distance between the grid and the object varies, this variation of height produces a variation in the pattern of

by the projected grid; the image of the object having intensity values for each pixel position; being located at the two different positions to yield at

over the object to be measured and its shadow on the object

and the camera that is used to take a picture of the resulting

for the corresponding pixel; e) projecting the grid on the object; the grid being located at the ?rst position; f) taking with the camera an image of the object illuminated

Surface inspection methods based on Moiré interferometry allow measuring the relief of an object in the visible spectrum with accuracy much more than the accuracy of classic inter ferometric methods. These methods are based on the analysis

being located at two different known positions relative to the camera and to the reference object to yield at least

three intensity values for each pixel;

fringes of the resulting interferogram increases, causing its that they require measuring assemblies that are particularly

reference object; b) taking, with the camera, an image of the reference object

used in the visible spectrum to measure height variations in the order of micron. However, it has been found dif?cult to use such method to measure height variations (relief on a surface showing varia

More speci?cally, in accordance with the present inven tion, there is provided a method for measuring the relief of an object using a camera provided with an array of pixels, the

method comprising:

length of the laser and the con?guration of the measuring

assembly generally determine the period of the resulting interferogram. Classic interferometry methods are generally

Another object of the invention is to provide such a system

suitable for lead coplanarity inspection.

65

and at least three images of the projected grid onto the reference object; each of the images of the projected grid onto the object corresponding to a different known position of the grid; each of the images of the

US RE42,899 E 4

3 projected grid onto the reference object correspond

Turning noW more speci?cally to FIG. 2 of the appended

draWings, the grid projecting assembly 11 and the image

ing to one of the knoWn positions of the grid;

acquisition apparatus 12 Will be described in more detail.

b) computing the reference object phase for each pixel using the at least three reference object intensity values

The grid projection assembly 11 includes an illuminating

for the corresponding pixel; c) computing the object phase for each pixel using the at

assembly 22, a grid 24 mounted to a movable support 26 and a projector 28.

The illuminating assembly 22 advantageously includes a source of White light 34 that is projected through the grid 24.

least three obj ect intensity values for the corresponding

pixel; and d) computing the difference of height betWeen the object and the reference object for each pixel using the refer

For example, the source 34 is the end of an optical ?ber (not

shoWn) providing light from a White light source (not shoWn). An aspherical lens 36 or any other condenser is also advan tageously used betWeen the source 34 and the grid 24. Other light sources may also be used. It is also believed to be Within the reach of a person skilled in the art to conceive another

ence object phase and the object phase for the corre

sponding pixel. Other objects, advantages and features of the present invention Will become more apparent upon reading the fol

illuminating assembly Within the spirit of the present inven

loWing non-restrictive description of preferred embodiments thereof, given by Way of example only, With reference to the

accompanying draWings. BRIEF DESCRIPTION OF THE DRAWINGS

20

In the appended draWings:

required.

FIG. 1 is a schematic vieW of a system for inspecting the surface of an object according to an embodiment of the

present invention;

25

FIG. 2 is a schematic vieW of both the image acquisition

apparatus and the grid projection assembly of FIG. 1; FIG. 3 is a schematic vieW illustrating the projection of a grid on an object; FIG. 4 is a block diagram of a method for measuring the relief of an object according to an embodiment of the present

tion. The con?guration of the grid 24 may vary depending on the resolution that is required to adequately measure the relief of the object 30. For example, it has been found that a ronchi ruling having 250 lines per inch alloWs to measure lead copla narity of a circuit board, Where a resolution around 1 mm is

30

The grid 24 is advantageously mounted to a moveable support 26 that alloWs displacement of the grid 24 in a direc tion perpendicular (see double arroW 40 on FIG. 2) to both the lines on the grid 24 and to the direction of incidence of the light (dashed line 42 on FIG. 2). The movable support 26 is actuated by a stepping motor

(not shoWn). The stepping motor is advantageously con trolled by a micro-controller (not shoWn) triggered by the computer 14. Of course, the stepping motor could be directly

controlled by the computer 14.

invention;

A projector 28, in the form of a 50 mm TV lens, is advan

FIG. 5 is an image of a sphere mounted to a board, as taken

by the system of FIG. 1; FIG. 6 is an image of the board of FIG. 5, illuminated by the

35

grid; FIG. 7 is an image computed by the system of FIG. 1, representing the phase of the board of FIG. 6;

depending on the nature of the object 30 to be measured. It is believed to be Within the reach of a person skilled in the

FIG. 8 is an image of the sphere of FIG. 5 mounted to the

board, illuminated by the grid; FIG. 9 is an image computed by the system of FIG. 1, representing the phase of the sphere With the board of FIG. 8; FIG. 1 0 is an image illustrating the phase variation betWeen the images of FIGS. 7 and 9; FIG. 11 is an image representing the phase variation

tageously used to project the grid 24 onto the object 38. The angle 6 betWeen the direction of incidence of the light (dashed line 42 on FIG. 2) and the line of sight of the image acquisition apparatus 12 (dashed line 44 on FIG. 2) may vary

40

art to position the illuminating assembly 22, the grid 24 and the grid projector 28 relative to the object 30 to yield a

projected grid having the desired pitch p onto the object 30. For example, a ronchi grid, having a density of 250 lines per inch, With a distance 43 of 22 cm betWeen the object 30

betWeen a module comprising lead balls on a substrate and a

and the projector 28, and for an angle 6 of 30 degrees, pro vides a projected grid having a 0.5 mm pitch p. Such a pitch

reference surface;

is equivalent to a variation of height of about 1 mm on the

FIG. 12 is an image representing the phase of the module of FIG. 11; FIG. 13 is an image representing the phase variation betWeen the phase of the image of FIG. 12 and the phase

surface of the object 30.

image of a complementary surface; FIG. 14 is an image representing the phase variation betWeen the phases of the images of the complementary sur face and the reference plane; FIG. 15 is the image of FIG. 14 after unWrapping.

45

50

55

DESCRIPTION OF THE PREFERRED EMBODIMENT 60

form of a CCD camera 46. Such a camera provides, for

The image acquisition apparatus 12 also advantageously

system 10 for measuring the relief of an object, according to an embodiment of the present invention, Will be described.

16, an output device 18 and an input device 20.

the object 30 and the camera 46 together. It is to be noted that the system 10 does not require a grid betWeen the camera 46 and the object 30. This advantage Will be discussed hereinbeloW. The image acquisition apparatus 12 includes a camera 46, provided With an array of pixels, and is advantageously in the

example, a resolution of 1300x1024 pixels.

Turning noW to FIGS. 1 and 2 of the appended draWings, a

The surface inspection system 10 comprises a grid project ing assembly 11, an image acquisition apparatus 12, and a computer 14 advantageously provided With a storing device

Obviously, the pitch of the projected grid Will vary With the pitch of the grid 24. As Will be explained hereinbeloW, the displacement of the projected grid 24 on the object 30 may alternatively be achieved by ?xing the position of the grid 24 and by moving

includes a telecentric lens 48, advantageously mounted to the camera 46 via an optional extension tube 50. 65

The con?guration of the image acquisition apparatus 12 and the distance betWeen the apparatus 12 and the object 30 determines the ?eld of vieW of the image acquisition appara

US RE42,899 E 6

5

Although the above equation is valid for a parallel projec

tus 12. Alternatively, a desired ?eld of view can be achieved

without the extension tube 50 by distancing the camera 46 from the object 30.

tion of the grid on the object, as illustrated in FIG. 3 (note that the incidence ray 60 from the grid projection are parallel), it is believed to be within the reach of a person skilled in the art

The CCD camera can be replaced by a conventional cam

era when the computer 14 is con?gured to digitize the

to use another equation if the grid projection is not parallel. For example, it has been found with a pinhole projection that the pitch p and the angle 6 increase with the distance from the grid on the plan of the reference surface (see x on FIG. 3).

acquired images. The computer 14 is advantageously con?gured to control the displacement of the grid 24, to process the images of the object 30 taken by the camera 46 and to analyZe these images

It has been found that with a ?rst order approximation, varia tions in p and S cancel each other out and the Equation 2 remains valid within a certain limit of the parameters. It is believed within the reach of someone skilled in the art to re-evaluate the relation between the variation of height h(x,y) and the phase MD, and to make corrections to the relation according to the con?guration of the system used to

to measure the relief of the object 30.

The computer 14 is advantageously provided with memory means allowing storing of the images when they are pro cessed by the computer 14 and therefore increasing the pro

cessing speed. The storing device 16 can be, for example, a hard drive, a writable CD-ROM drive or other well-known data storing means. It can be directly connected to the computer 14, or remotely connected via a computer network such as the Inter net. According to an embodiment of the invention, the storing

device 16 is used to store both the images taken by the image acquisition apparatus 12, the relief of the object 30 and other intermediary results. Those ?les can be stored in any format and resolution that can be read by the computer 14. The output device 20 allows visualiZation of the images and of the data produced by the computer 14, and can take

measure the relief.

20

Generally stated, the method consists in measuring the relief of an object 30 using the system 10 by performing the

following steps: 100ipositioning the grid 24 at a ?rst position relative to a

reference object;

many forms from a display monitor to a printing device. The input device 18 can be a conventional mouse, a key board or any other well-known input device or combination

thereof which allows inputting of data and commands into the computer 14.

The storing device 16, the display monitor 18 and the input

102iprojecting the grid 24 on the reference object; 1 04itaking, with the camera 46, an image of the reference

object to gather an intensity value for each pixel of the

image; 30

device 20 are all connected to the computer 12 via standard connection means, such as data cables. The computer 14 can be a conventional personal computer or any other data processing machine that includes a proces

sor, a memory and input/output ports (not shown). The input/ output ports may include network connectivity to transfer the images to and from the storing device 16. Of course, the computer 12 runs software that embodies the method of the present invention thereof, as will be described hereinbelow. It is to be noted that the system 10 includes adjustable

spirit of the present invention.

35

40

45

present invention, the general theory underlying such a 50

only be brie?y described herein. The intensity I(x,y) for every pixel (x,y) on an interfero 55

where MD is the phase variation (or phase modulation), andA

motor. As it has been discussed hereinabove, the system 10 includes means to register and ?x the position of the grid 24 and the camera 46 relative to the reference object (and later

In step 102, the grid 24 is then projected onto the reference

Knowing the phase variation MD, the object height distri

_ Adm. y>-p

By choosing a similar board as the reference object, the difference of height between the object 62 and the reference object will provide the height of the sphere 64. The common element to the object 62 and the reference object is, in this example, the board 66. In step 100, the grid 24 is moved to a ?rst predetermined

the object).

and B are coe?icient that can be computed for every pixel.

surface can be computed using the following equation (see FIG. 3):

These general steps will now be further described with reference to a ?rst example where the object 62 to measure is a sphere 64 mounted to a board 66. An image of said object 62

position using the support 26 that is actuated by the stepping

metric image may be described by the following equation:

bution (the relief) at every point h(x,y) relative to a reference

intensity values; 110irepeating steps 100 to 108 by replacing the reference object with the object 30 to be measured; 112icomputing, for each pixel, the difference of height between the object 30 and the reference object by using the respecting phases thereof for every pixel; and 114idetermining the relief of the object for each pixel using the difference of height at every pixel.

can be seen in FIG. 5.

Before giving a detail description of a method for measur ing the relief of an object according to an embodiment of the

method will ?rst be described. Since this theory is believed to be well known in the art and for concision purposes, it will

106irepeating steps 100 to 104 at least two times with the grid positioned at two new different known positions to

yield at least three intensity values for each pixel; 108icomputing the phase for each pixel using the three

support means (not shown) to position the image acquisition apparatus 12 and the grid projecting assembly 11 relative to each other and to the object 30. Alternatively, other registra tion means can be used without departing from the nature and

Turning now to FIG. 4 of the appended drawings, a method for measuring the relief of an object according to an embodi ment of the present invention will be described in more detail.

object. 60

In step 104, the camera 46 takes an image of the reference

object. The image includes an intensity value for each pixel of the image. The computer 14 stores these intensity values for

(2)

future processing.

how)‘ 27r-tan(0) 65

Steps 100 to 104 are then repeated at least twice with the

where p is the grid pitch and 6 is the projection angle, as

grid positioned at two new known different positions (step

described hereinabove.

106). This will provide three slightly different images and

Object

object (for example 45 degrees) and using a camera, posi tioned at a second .... computer 14 advantageously provided With a storing device. 16, an output ...

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the subject's verbal response triggered a voice key linked to a headset micro- phone. The intertriai interval was fixed at 2000 msec after the response. The five ...

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Software Development Methodology and Programming Fundamentals. Stream. (Eg. Project. Mgmnt/Customer. Interface/Consulti ng etc.) PM ... 1 PM Stream (Choose one)-SE: Software Engineer, PA: Programmer Analyst, PM: Project Manager.

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Alan Kay, one of the promoters of the object-oriented paradigm and the principal. designer of Smalltalk, has said: “As complexity increases, architecture ...