USO0RE43405E

(19) United States (12) Reissued Patent

(10) Patent Number: US RE43,405 E (45) Date of Reissued Patent: May 22, 2012

Kato (54)

METHOD OF DISPLAYING MEASUREMENT

6,339,653 6,438,438 6,449,585 6,456,951 6,529,619 6,542,830 6,546,308 6,628,817 6,638,779 6,757,621 6,974,710

RESULT IN INSPECTION PROCESS AND

SYSTEM THEREOF, AND COMPUTER PROGRAM

(75) Inventor:

Kazufumi Kato, Sakata (JP)

(73) Assignee: Seiko Epson Corporation, Tokyo (JP)

(21) App1.N0.: 12/018,757 (22) Filed:

B1

B1 B1 B1 B2 B1 B2 B2 B2 B2 B2

1/2002 8/2002 9/2002 9/2002 3/2003 4/2003 4/2003 9/2003 10/2003 6/2004 12/2005

Takagi et a1. Hyun et a1. Maeda et a1. Ishikawa et a1. MiZuno et a1. Takagi et a1. Ishikawa et a1. Taira MiZuno et a1. Taira

(Continued)

Jan. 23, 2008

FOREIGN PATENT DOCUMENTS

Related US. Patent Documents

JP

05-074899

Reissue of:

(64)

Ishikawa et a1.

3/1993

(Continued)

Patent No.:

6,990,421

Issued:

Jan. 24, 2006

Appl. No.:

10/677,755

Filed:

Oct. 1, 2003

Primary Examiner * Drew A Dunn

Assistant Examiner * Stephen Cherry

(74) Attorney, Agent, or Firm * DLA Piper LLP (U S)

(30)

Foreign Application Priority Data Oct. 2, 2002

(57)

(JP) ............................... .. 2002-290009

(51)

Int. Cl. G01N 37/00

(52)

US. Cl. ............... .. 702/81; 702/35; 702/84; 702/97

(58)

Field of Classi?cation Search ................ .. 324/751,

(2006.01)

324/760; 356/237.4, 394; 382/141, 145, 382/149; 438/14, 16, 17; 700/103, 108, 700/109,110,121; 702/35, 81, 84, 97 See application ?le for complete search history. (56)

11/1998 2/2001 2/2001 12/2001

network is abnormal or normal based on a predetermined measured value so as to transmit the result to the device and a

fourth step that the device provides a display corresponding to the result of assessing the measured value in accordance with

U.S. PATENT DOCUMENTS 5,801,965 A 9/1998 Takagi et a1. A B1 B1 B1

A method of di splaying a measurement result in an inspection process using network, the method includes a ?rst step that a host, which intensively controls and manages a device for inspecting a lot to be processed in one or a plurality of steps, transmits to the device a condition of measuring a lot deter mined to be put in, a second step that the device measures the lot based on the measurement condition received via the network and then obtains measured data, a third step that the host determines whether the measured data received via the

assessment standard and then produces a result of assessing a

References Cited

5,841,893 6,185,322 6,185,324 6,330,352

ABSTRACT

the received result of assessing the measured value as well as

Ishikawa et a1. Ishikawa et a1. Ishihara et a1. Ishikawa et a1.

a previously registered display standard. 12 Claims, 6 Drawing Sheets

0 A drawing showing the interactive relation in control between a host "A" and a device

2D

device control sewer

10

steps management server

measuring devise

hast terminal

carrier (lot) 50

US RE43,405 E Page 2 US. PATENT DOCUMENTS 2001/0001015 2001/0020194 2001/0038708 2002/0034326 2002/0132381

A1 A1 A1 A1 A1

5/2001 9/2001 11/2001 3/2002 9/2002

Ishikawa et a1.

2003/0130806 A1 2004/ 0092049 A1

Takagi et a1. Ishikawa et a1. Ishikawa et a1. Taira

7/2003 MiZuno et a1. 5/2004 Taira

FOREIGN PATENT DOCUMENTS JP JP

05-074900 2002100547 A

3/1993 4/2002

US. Patent

May 22, 2012

Sheet 1 0f 6

US RE43,405 E

O A drawing showing the interactive relation in control between a host "A" and a device

2D

device control sewer

host

A steps managenW server

4OT 40 _

measurlng device

host terminal. 30

carrier (lot)

FIG. 1

US. Patent

May 22, 2012

Sheet 2 of6

US RE43,405 E

Operational procedures In an inspection process device

host

S1 (D determines input of a targeted lot from a host terminal

32 (2 reserves 3 processing port and instructs measurement conditions measurement conditions:

processing recipe,

the number of points of measurement. the location of a wafer within a carrier

h

to be measured

S3 (3) accepts the reservation for the measurement

r=?> $4 @I instructs a start of the measurement

-# S5 6) starts measurement

36 @ advises'l'measured data

:5: S? (it obtains the rneasured data $5 @ assesses tll'e measured data 59 (S) instructs a display of a result of assessing a measured value

-_

instructs ?ashing of the signal tower

$10 (It! when the assessment result in S8 is abnormal

_

?ashes red color of the signal lower

displays the abnormal lot number 511

when the assessment result in SE is normal

?ashes yellow color of the signal tower displays that the assessment result is normal

FIG. 2

US. Patent

May 22 , 2012

US RE43,405 E

Sheet 3 0f 6

Status of a product under control by a host implemented to enable How of product

preliminary processing P01 waiting for the lot transter

(WAIT) (53a)

carrier cassette device

[RES ERVE)

lprellminatryr prooessingl?

receiving an instruction for a start from the host v

waiting for the start of

processing at the port

I actual processing

(STAND BY]

B5

86

/

I Iaterprocessing I E'I't EB. 39. 510

40

standby status: a condition that a product in process can be carried into a device

prelirrtinan.r processing status: _ a condition that the device reserves processing of the

product in process actual processing status: a condition that the product in process is actually being processed later processing status: a condition that processing the product in process is terminated and then it: is being waited the host's deten-nining whether the processing has been normally conducted

FIG. 3

US. Patent

May 22, 2012

Em:[email protected];nm“6ao

Sheet 4 of6

US RE43,405 E

:m5528.9:E6“wm3a:5ow0%“

wc9:mg:EmHa3?nwE2m; :59mmEmcH‘,5h.zwo:m2E

mm:m58wm?EHz93umc?%o En

.OEw

US. Patent

May 22, 2012

Sheet 6 of6

US RE43,405 E

operational procedures In a conventional inspection process devlce

device centrel server

eteps management server

(i) detem'tines input of a targeted let to be put in +-

frern a heat terminal

1- IIZ) makee a reservation with the device @eceepts the reservation —> for measurement

@lnetnlete measurement conditions -1—

instructs a start at the

measurement

t5) starts the measurement (5) edvlees measured data —I- If?) obtains measured date —I‘ (E) assesses the measured

data

l (5) continue the measurement result etthe hest termlnal

when the measurement result is aece table carries the let to a next step

when the measurement

m euepen?s En'ngmg the lotto the next step

H6. 6 Prior Art

US RE43,405 E 1

2

METHOD OF DISPLAYING MEASUREMENT RESULT IN INSPECTION PROCESS AND

measuring device equipped with a signal tower can be

checked. However, it is not possible to instantly perform validation of the measured result by referring to the appear

SYSTEM THEREOF, AND COMPUTER PROGRAM

ance. Also, when an inspector of an inspection process is in charge of a plurality of devices and gets stuck with a device

Matter enclosed in heavy brackets [ ] appears in the original patent but forms no part of this reissue speci?ca

be away from other measuring devices. Moreover, an opera tor has to take an action (required processing) after a host terminal con?rms whether it has checked if the measurement

that takes a few minutes to measure one lot, the inspector may

tion; matter printed in italics indicates the additions made by reissue.

completed lot satis?es the quality standard; whether the lot should be brought over to the next step; and whether the lot should be reported to an engineer.

The present invention has been achieved in light of the above problems and intends to provide a method of display

Notice: More than one reissue application has been ?led

for the reissue of US. Pat. No. 6,990,421. The reissue appli cations are this application (US. application Ser No. 12/018,

ing a measurement result in an inspection process. The method allows a host via a network to assess a result of

75u?led on Jan. 23, 2008, which is a reissue ofU.S. Pat. No. 6,990,421, and US. application Ser No. 12/959,289,?led on Dec. 2, 2010, which is a divisional reissue of US. Pat. No.

inspecting a lot and then has an inspection device display the result. The method also enables an interlock to the next step,

6,990,421.

and a system thereof as well as a computer program. 20

BACKGROUND OF THE INVENTION

SUMMARY OF THE INVENTION

1. Field of the Invention The present invention relates to a method of checking a result of a measurement and more particularly to a method of 25

displaying a measurement result in an inspection process using a network and a system thereof and further to a com

puter program. 2. Description of Related Art Conventionally, one host terminal is installed for one mea

30

suring device in an operational environment in an inspection process in a factory for manufacturing things such as semi

35

since data standards in respective processes are different, the for an operator to determine whether it is possible to bring

the received result of assessing the measured value as well as 40

a previously registered display standard.

45

An embodiment of the present invention resides in the method of displaying a measurement result in an inspection process, wherein the third step includes a step that when the result of assessing the measured value is abnormal, a host terminal connected to the host displays that the lot is abnor

determines whether a lot can be brought over to a next step.

FIG. 6 is a drawing showing a ?ow of operational proce dures in a conventional inspection process. A process management server 1) determines the input of a targeted lot from a ho st terminal. Then, a device control server 2) makes a reservation with a device. The device 3) accepts the reservation for the measurement. The device control

mal, and when the result of assessing the measured value is

server 4) instructs conditions and a start of measurement. The

device then 5) starts measurement and 6) advises measured data. The device control server 7) obtains the measured data.

50

measured value and a display of an operating condition show

ing the device being operating or not operating, by lighting

When the measurement result is acceptable, the lot is carried 55

up, turning off, or ?ashing four colors of a four color display unit connected to the device, the unit including a ?rst display portion, a second display portion, a third display portion and a fourth display portion of colors different from each other. An embodiment of the present invention resides in the

60

method of displaying a measurement result in an inspection

bringing the lot to the next step is suspended. In some cases, an appearance inspection is performed with respect to a lot by each category based on a result of measur

ing electrical characteristics. The content of the lot is classi ?ed based on the result of measuring the electrical character istics

and the

appearance

inspection

so

as

to

process, wherein the fourth step includes a step of providing a display showing the operating condition of the device and a

be

accommodated in an accommodating magazine. In other cases, the content of a lot is sealed and shaped according to categories based on a result of measuring electrical charac teristics.

However, technologies of the prior art have the following problems. When measurement of a product is completed, a

normal, the ho st terminal displays that the lot starts into a next process. An embodiment of the present invention resides in the method of displaying a measurement result in an inspection process, wherein the fourth step includes a ?fth step of pro

viding a display corresponding to the result of assessing the

The process management server 8) assesses the measured data, and the ho st terminal con?rms the measurement result. to a next step. When the measurement result is not acceptable,

mal or normal based on a predetermined assessment standard and then produces a result of assessing a measured value so as to transmit the result to the device. The method includes a

fourth step that the device provides a display corresponding to the result of assessing the measured value in accordance with

host assesses measured data for validation thereof. In order

(hand over) a(n) (intermediate) product to a next step, the host terminal recognizes a corresponding measurement result by using an application of a process management system and

that the device measures the lot based on the measurement

condition received via the network and then obtains measured data. The method includes a third step that the host determines whether the measured data received via the network is abnor

conductors. Also, regarding the measuring device, there are measuring devices equipped with signal towers and with ter minals in a mixed manner in the environment. Moreover,

An embodiment of the present invention resides in a method of displaying a measurement result in an inspection process using a network. The method includes a ?rst step that a host, which intensively controls and manages a device for inspecting a lot to be processed in one or a plurality of pro cesses, transmits to the device a condition of measuring a lot determined to be put in. The method includes a second step

display corresponding to the result of assessing the measured value on a device monitor connected to the device. 65

An embodiment of the present invention resides in the method of displaying a measurement result in an inspection process, wherein the third step includes a step of not trans

US RE43,405 E 3

4

mitting an instruction to transfer a corresponding lot or of transmitting an instruction to transfer the lot to a buffer, to a

transfer the corresponding lot or transmits an instruction to transfer the lot to a buffer, to a transferring portion connected to the host via the netWork in case that the result of assessing

transferring portion connected to the host via the netWork in case that the result of assessing the measured value is abnor mal While transmitting to the transferring portion an instruc tion to transfer the corresponding lot and also transmitting to

the measured value is abnormal While transmitting to the transferring portion an instruction to transfer the correspond ing lot and also transmitting to a processing device for a next process an instruction to start processing of the corresponding lot in case that the result of assessing the measured value is normal. An embodiment of the present invention resides in the system of displaying a measurement result in an inspection

a processing device for a next process an instruction to start

processing of the corresponding lot in case that the result of assessing the measured value is normal. An embodiment of the present invention resides in the method of displaying a measurement result in an inspection process, Wherein the second step includes a step of reading a

process, Wherein the device includes an identi?cation means

lot number such as a bar code by means of an identi?cation

means mounted in the device and then adding the lot number to the measured data so as to transmit the data to the ho st, and

5

Wherein the third step includes a step of including the lot number in the produced result of assessing the measured value. An embodiment of the present invention resides in a com

puter program capable of implementing an operation by the

20

method of displaying a measurement result in an inspection process, Wherein each step in the method of displaying a measurement result in an inspection process is encoded. An embodiment of the present invention resides in a sys tem of displaying a measurement result in an inspection pro cess using a netWork. The system includes a device that

transmit an instruction to transfer a corresponding lot or transmits an instruction to transfer the lot to a buffer, to a

transferring portion connected to the host via netWork in case that a result of assessing a measured value of the lot is abnor

mal While transmitting to the transferring portion an instruc tion to transfer the corresponding lot and also transmitting to

sponding to the inspection process so as to obtain measured

data; and a host that intensively controls and manages the

via the network the measurement condition of a lot deter mined to be put in; and a processes management server that assesses the measured data, Which is received via the net Work, based on a predetermined assessment standard, and

30

assessing the measured value is normal. An embodiment of the present invention resides in a host server for use in an inspection process using a netWork. The 35 host server includes a device control server that controls a

device of the inspection process in one or a plurality of pro cesses via the netWork and transmits to the device a condition of measuring a lot determined to be put in and a processes

transmit the result to the device. The device provides a display corresponding to the result of assessing the measured value in accordance With the received result of as sessing the measured

An embodiment of the present invention resides in the system of displaying a measurement result in an inspection process, Wherein the host includes a host terminal connected to the netWork, and the host terminal displays that the lot is abnormal When the result of assessing the measured value is abnormal While displaying that the lot starts into a next pro cess When the result of assessing the measured value is nor mal. An embodiment of the present invention resides in the system of displaying a measurement result in an inspection process, Wherein the device includes a four color display unit

a processing device for a next process an instruction to start

processing of the corresponding lot in case that the result of

then produces a result of assessing a measured value so as to

value and a previously registered display standard.

the lot number in the produced result of assessing the mea sured value. An embodiment of the present invention resides in a lot processing system using the system of displaying a measure ment result in an inspection process., The system includes a host that controls and manages a device for inspecting a lot in each of a plurality of processes, Wherein the host does not

measures a lot based on a measurement condition corre

device in one or a plurality of processes. The host further includes a device control server that transmits to the device

for reading a lot number such as a bar code, Wherein the identi?cation means reads the lot number and then adds the number to the measured data so as to transmit the data to the host, and Wherein the processes management server includes

40

management server that intensively manages the device, assesses measured data, Which is received via the netWork, based on a predetermined assessment standard, and then pro duces a result of assessing a measured value so as to transmit

the result to the device. An embodiment of the present invention resides in the host server, Wherein the processes management server does not transmit an instruction to transfer a corresponding lot or transmits an instruction to transfer the lot to a buffer, to a

50

including a ?rst display portion, a second display portion, a third display portion and a fourth display portion of colors different from each other. The four color display unit provides

transferring portion connected to the host via the netWork in case that the result of assessing the measured value is abnor mal While transmitting to the transferring portion an instruc tion to transfer the corresponding lot and also transmitting to a processing device for a next step an instruction to start

processing of the corresponding lot in case that the result of assessing the measured value is normal. An embodiment of the present invention resides in a device for implementing an inspection in an inspection process using

a display corresponding to the result of assessing the mea sured value and a display shoWing an operating condition of

the device operating or not operating, by lighting up, turning

a netWork. The device includes a four color display unit

off or ?ashing four colors of the four color display unit. An embodiment of the present invention resides in the system of displaying a measurement result in an inspection process, Wherein the device includes a device monitor, and

including a ?rst display portion, a second display portion, a third display portion and a fourth display portion of colors different from each other; and a main unit, incorporated in the device, that transmits to a host server via the netWork mea sured data obtained by measuring a lot based on a measure

the device monitor provides the display shoWing the operat ing condition of the device and the display corresponding to system of displaying a measurement result in an inspection

ment condition corresponding to the inspection process. The four color display unit provides a display corresponding to a result of assessing a measured value and a display shoWing an operating condition of the main unit of the device operating or

process, Wherein the host does not transmit an instruction to

not operating by lighting up, turning off or ?ashing the four

the result of assessing the measured value. An embodiment of the present invention resides in the

65

US RE43,405 E 5

6

colors in accordance With the result of asses sing the measured value received by the main unit of the device from the host server via the network and a previously registered display standard. An embodiment of the present invention resides in the

Moreover, the device 40 includes a device monitor (not shoWn in the draWing) for displaying information such as an abnormal lot number. Next, a method using the system of displaying a measure ment result in an inspection process is explained. FIG. 2 is a draWing shoWing a ?oW of operation by a method for displaying a measurement result in an inspection process according to this embodiment. The host “A” determines an input of a targeted lot from the

device, further including a device monitor that provides the display shoWing the operating condition of the main unit of the device and the display corresponding to the result of assessing the measured value. An embodiment of the present invention resides in the device, further including an identi?cation means for reading

host terminal 30 (step S1).

a lot number such as a bar code and then adding the number to the measured data so as to transmit the data to the host server,

surement conditions (step S2). As the measurement condi tions, parameters (measurement conditions) such as a pro cessing recipe, the number of points of measurement and the

The host “A” reserves a processing port and instructs mea

Wherein the device monitor displays the lot number included in the result of assessing the measured value transmitted from

location of a Wafer Within a carrier to be measured are set.

The device 40 accepts the reservation for the measurement

the host server.

(step S3). BRIEF DESCRIPTION OF THE DRAWINGS 20

FIG. 1 is a draWing shoWing a schematic structure of a

system of displaying a measurement result in an inspection process according to an embodiment of the invention. FIG. 2 is a draWing shoWing the ?oW of the operation by a method of displaying a measurement result in an inspection process according to the embodiment of the invention. FIG. 3 is a draWing shoWing a state of operation in each step in FIG. 2.

FIG. 4 is a draWing shoWing the relationship betWeen dis plays by a signal toWer in FIG. 1 and steps in FIG. 2. FIG. 5 is a draWing shoWing an example of the correspon

host “A” of measured data (step S6). The host “A” obtains the measured data (step S7), assesses the measured data (step S8) and then transmits a result of assessing a measured value (an instruction for displaying the 25

device ?ashes a red light of the signal toWer or has the device

monitor to display the abnormal lot number (step S10). 30

35

As shoWn in FIG. 3, step S1 implements ‘a standby (to Wait

40

implements ‘a preliminary processing.’ As shoWn in this pre liminary processing P01, operation shifts in the order of Wait ing for the lot transfer (WAIT) (step S3a), a carrier cassette

45

the host “A” (step S3b) and Waiting for the start of processing at the port (STANDBY). Step S5 implements ‘an actual pro cessing (to implement an inspection in accordance With the instruction by the host “A” in step S2).’

device (RESERVE), receiving an instruction for a start from

beloW With reference to draWings. FIG. 1 illustrates a sche matic structure of a system of displaying a measurement

Steps S7 to S10 serve as ‘a later processing.’ Speci?cally, the host “A” obtains measured data (step S7), assesses the measured data (step S8) and then transmits a result of assess ing a measured value (instruction for displaying the result of

process management server 10 and a device control server 20,

a host terminal 30 and a device (measuring device) 40 includ

50

ing a signal toWer (four (4)-lamp light and four color display

assessing the measured value) (step S9). When the result of assessing the measured value is abnormal (When the assess ment result is abnormal in step S8), the device ?ashes the red light of the signal toWer or has the device monitor to display

unit) 40T. The device (main unit of the device) 40 measures each lot (carrier) 50. The host “A” stores a host management table including a

machine type of the device 40, step numbers, items for

FIG. 3 is a draWing shoWing the state of operation in each step shoWn in FIG. 2. for a lot to be carried in When a port is available)’, and step S3

An embodiment of the invention is explained in detail

result in an inspection process according to this embodiment. As shoWn in FIG. 1, the system of displaying a measure ment result in the inspection process according to this embodiment includes a host (host server) “A” including a

When the result of assessing the measured value is normal (When the assessment result is normal in step S8), the device ?ashes a yelloW light and shoWs that the measurement result

is normal (step S11).

toWer.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

result of assessing the measured value) (step S9). When the result of assessing the measured value is abnor mal (When the assessment result is abnormal in step S8), the

dence betWeen messages shoWn by a device monitor con nected to a host terminal and a device in FIG. 1 and the signal

FIG. 6 is a draWing shoWing the ?oW of operational pro cedures in an inspection process of the prior art.

The host “A” instructs a start of the measurement (step S4). The device 40 starts measurement (step S5) and advises the

55

the abnormal lot number (step S10). Step S2, step S4 and step S6 each display ‘transmitting and

inspection (the thickness and the Width, for example) and subjects of inspection (the ?lm thickness and the line Width,

receiving’ status betWeen the host “A” and the device 40. More speci?cally, the host “A” executes step S2: reserving the

for example); a process ?oW (a ?oW sheet); and a lot progress/

processing port and instructing the measurement conditions,

processing log. Moreover, the host “A” determines the input of a targeted lot from the host terminal 30, reserves a process

60

ing port and then instructs conditions of measurement. As the

measurement conditions, parameters (measurement condi tions) such as a processing recipe, the number of points of measurement and the location of a Wafer Within a carrier to be measured are set. Furthermore, the ho st “A” obtains measured

data from the device 40, assesses the measured data and then transmits a result of assessing a measured value.

65

and step S4: instructing the start of measurement. The device 40 executes step S6: advising the host “A” of the measured data. FIG. 4 is a draWing shoWing the relationship betWeen dis plays of the signal toWer 40T shoWn in FIG. 1 and the steps shoWn in FIG. 2. The signal toWer 40T is a four (4)-lamp light 40T including

a blue color display portion (a ?rst display portion) C1, a green color display portion (a second display portion) C2, a

US RE43,405 E 8

7 yellow color display portion (a third display portion) C3 and a red color display portion (a fourth display portion) C4. In step S1 through step S11, the blue color display portion

port. The signal toWer display D4 corresponds to ?ash ing of the red color display portion C4 shoWn in FIG. 4. ‘S10’ in the sequence D2 corresponds to step S10, speci?

C1 is lighted When the device 40 is under control of the host “A”, Which means that on-line processing is executable.

measured data falls outside of the range of the product quality

cally corresponding to a case that even one bit of data of the

Moreover, When the blue color display portion C1 is “off”, it

standard established inside a company. The signal toWer dis

indicatesthat manual measurements are executable.

play D4 corresponds to ?ashing of the red color display

In step S5, the green color display portion C2 is lighted

portion C4 shoWn in FIG. 4. ‘S11’ in the sequence D2 corresponds to step S11, speci?

When the device 40 executes processing, Which means that measurements are being conducted. Moreover, When the

cally corresponding to a case that all the measured data falls

When the measurement result in step S8 is normal. This means a normal state assuring that the measurement processing is

Within the range of the product quality standard established inside a company. The signal toWer display D4 corresponds to ?ashing of the blue color display portion C1 and that of the green color display portion C2 shoWn in FIG. 4. Moreover, the yelloW color display portion C3 also ?ashes (not shoWn in

completed normally and all the measured data falls Within the

the draWing).

green color display portion C2 is “off”, it indicates that the device 40 is not operating. In step S11, the yelloW color display portion C3 ?ashes

range of a standard quality. Moreover, on the other hand, the device monitor displays an abnormal lot number When an abnormal operation occurs and also the operating condition of the device 40 such as being measuring or not operating. In step S10, When an abnormal operation occurs in the

Furthermore, When the result of assessing the measured value is abnormal, the host “A” does not transmit an instruc tion to transfer the corresponding lot 50 or transmits an 20

host “A”. When the result of assessing the measured value is normal, the host “A” transmits to the transferring portion an instruction to start transfer of the corresponding lot 50 and

device 40, or When the measured result is abnormal as a result

of reserving the processing port and instructing the measure ment conditions in step S2 and also as a result of instructing

the start of measurement in step S4, the red color display

25

portion C4 ?ashes. As described above, using the ?rst display portion C1 through the fourth display portion C4 of the four (4)-lamp light 40T enables a display shoWing an operating condition of the device 40 operating or not operating and also a display

instruction to transfer the lot to a buffer as its destination, to a

transferring portion (not shoWn in the ?gure) connected to the

also transmits to a processing device for the next step an instruction to start processing of the lot 50. The above instruc tion for the transfer enables an abnormal lot to be promptly

processed. Moreover, by incorporating an identi?cation means (not

shoWing that the result of assessing the measured value of the

shoWn in the draWing) for reading a lot number such as a bar code and RFID, the device 40 can read a lot number, add it to

lot 50 is normal or abnormal.

measured data and then send it to the host “A”. Then, by

FIG. 5 is a draWing shoWing an example of correspondence betWeen the signal toWer 40T and messages shoWn by the

adding the lot number to a result of assessing a measured value, the host “A” can easily con?rm that the lot 50 is to be

device monitor connected to the host terminal 30 and the device 40 shoWn in FIG. 1. FIG. 5 shoWs a message number D1, a step number (se quence) D2, a message D3 and a signal toWer display D4. ‘S2’ in the sequence D2 shoWs a result of step S2, Which speci?cally corresponds to any one of the folloWing occa

30

35

In addition, the invention is not limited to this embodiment and is applicable to a method of displaying a measurement

result in an inspection process appropriate in applying this invention, a system thereof and a computer program. 40

When the main unit of the device 40 does not have a recipe

matching the recipe information designated by the host;

shape appropriate in implementing the invention. Furthermore, in the draWings, the same structural elements

When a designated device port is not in an usable condition; 45

are denoted With the same reference numerals.

Con?gured as above, the invention exhibits the folloWing

advantages.

ment etc.) designated by the host “A”; When another lot 50 is already processed at the designated device port; and When the device 40 terminates processing and is then Wait ing for the processed lot 50 to be transferred from the port. The signal toWer display D4 corresponds to ?ashing of the red color display portion C4 shoWn in FIG. 4.

Moreover, the number, location and shape of each of the above structural members is not limited to the ones de?ned in the above embodiment and can be any number, location and

s1ons:

When the designated device port already receives an instruction for another lot 50; When inadequacy is found With the recipe information (points of measurement, the number of points of measure

normal or abnormal.

50

In an inspection process relying on Work by an operator, it no longer happens that a lot is left and remains in a port of a device and an operator Waits for the next measurement. An operator can promptly take the next action on a mea

sured lot, such as bringing the lot to the next step or informing a relevant department of the occurrence of an abnormal con

dition. Consequently, it is possible to restrain sloWdoWn in 55

‘S4’ in the sequence D2 shoWs a result of step S4, Which speci?cally corresponds to any one of the folloWing occa sions: When the device 40 is not in a state capable of executing

processing a lot attributable to human-caused factor that arises in the ?oW of operation for a lot in an inspection process. When the invention is adaptable to a standard set by an

vation for the lot 50 (regardless of the presence of the lot

organiZation in the semiconductor industry such as the Semi conductor Equipment and Materials International (SEMI), a part of the process is operated by an on-line netWork, facili tating such processes thereby to be entrusted to an outside

50);

company.

processing;

60

When the designated device port has not received a reser

When another lot 50 is already processed at the designated device port; and When the device 40 terminates processing and is then Wait ing for the processed lot 50 to be transferred from the

No special pass/fail ?ags are necessary by managing an 65

inspection device With a host. Moreover, it does not happen that an NG lot is transferred to the next step (could be trans ferred but not processed). Relying on information of a signal

US RE43,405 E 9

10

tower, an operator of the device can easily recognize and

result of assessing the measured value as well as a pre

viously registered display standard,

grasp acceptability of a lot, thereby processing a targeted lot. What is claimed is: 1. A method of displaying a measurement result in an

wherein the providing step includes providing a display corresponding to the result of assessing the measured

inspection process using a network, the method comprising:

value and a display of an operating condition showing

transmitting to a device a measurement condition of a lot

the device operating or not operating, by lighting up, turning off, or ?ashing four colors of a four color display unit, connected to the device, the unit, including a ?rst display portion, a second display portion, a third display portion and a fourth display portion of colors different from each other.

determined to be used; measuring the lot based on the measurement condition received via a network and obtaining measured data; determining whether or not the measured data received via the network is abnormal or normal based on a predeter

mined assessment standard and producing a result of

7. A system of displaying a measurement result in an

assessing a measured value so as to transmit the result to

the device; and providing a display corresponding to the result of assessing

inspection process using a network, the system comprising: 15

a device that measures a lot based on a measurement con

the measured value in accordance with the received

dition corresponding to the inspection process so as to

result of assessing the measured value as well as a pre

obtain measured data; and

viously registered display standard,

a host that intensively controls and manages the device in one or a plurality of steps, the host further comprising:

wherein the determining step includes displaying that the lot is abnormal, when the result of asserting the mea sured value is abnormal and displaying that the lot starts into a next process when the result of assessing the measured value is normal.

20

to be used; and a process management server that assesses the measured

2. The method of displaying a measurement result in an

inspection process according to claim 1, wherein the provid ing step includes providing a display showing the operating

25

30

inspection process according to claim 1, wherein the deter mining step includes not transmitting an instruction to trans fer a corresponding lot or of transmitting an instruction to transfer the lot to a buffer, to a transferring portion connected to a host via the network in case that the result of assessing the

measured value is abnormal while transmitting to the trans ferring portion an instruction to transfer the corresponding lot and also transmitting to a processing device for a next process an instruction to start processing of the corresponding lot in case that the result of assessing the measured value is normal.

wherein the host comprises a host terminal connected to 35

40

inspection process according to claim 1, wherein the measuring step includes reading a lot number 45

data so as to transmit the data to a host, and

inspection process according to claim 7, wherein the device comprises a device monitor, and the device monitor provides the display showing the operating condition of the device and the display corresponding to the result of assessing the mea sured value. 9. The system of displaying a measurement result in an

lot or transmits an instruction to transfer the lot to a buffer, to 50

purer-readable medium capable of implementing operation by the method of displaying a measurement result in an

inspection process according to claim 1, further comprising encoding each step.

a transferring portion connected to the host via the network in case that the result of assessing the measured value is abnor mal while transmitting to the transferring portion an instruc tion to transfer the corresponding lot and also transmitting to a processing device for a next process an instruction to start

55

inspection process using a network, the method comprising: transmitting to a device a measurement condition of a lot

determined to be used; measuring the lot based on the measurement condition received via a network and obtaining measured data; determining whether or not the measured data received via

into a next process when the result of assessing the measured value is normal. 8. The system of displaying a measurement result in an

does not transmit an instruction to transfer the corresponding

value.

6. A method of displaying a measurement result in an

the network, and the host terminal displays that the lot is abnormal when the result of assessing the measured value is abnormal while displaying that the lots starts

inspection process according to claim 7, wherein the host

wherein the determining step includes including the lot number in the produced result of assessing the measured 5. A computer program embodied in a non-transitory com

result to the device, wherein the device provides a display corresponding to the result of assessing the measured value in accordance with the received result of assessing the measured value

and a previously registered display standard, and

4. The method of displaying a measurement result in an

including a bar code by an identi?cation mounted in the device and then adding the lot number to the measured

data, which is received via the network, based on a

predetermined assessment standard, and then produces a result of assessing a measured value so as to transmit the

condition of the device and a display corresponding to the result of assessing the measured value on a device monitor connected to the device. 3. The method of displaying a measurement result in an

a device control server that transmits to the device via the network the measurement condition of a lot determined

processing of the corresponding lot in case that the result of assessing the measured value is normal. 10. The system of displaying a measurement result in an

inspection process according to claim 7, 60

the network is abnormal or normal based on a predeter

wherein the device comprises an identi?cation unit for reading a lot number including a bar code, wherein the identi?cation unit reads the lot number and

mined assessment standard and producing a result of

then adds the number to the measured data so as to

assessing a measured value so as to transmit the result to

transmit the data to the host, and wherein the processes management server includes the lot

the device; and providing a display corresponding to the result of assessing the measured value in accordance with the received

65

number in the produced result of assessing the measured value.

US RE43,405 E 11

12

11. A lot processing system using the system of displaying

a device control server that transmits to the device via the netWork the measurement condition of a lot determined

a measurement result in an inspection process according to

to be used; and

claim 7, the system comprising:

a process management server that assesses the measured

a host that controls and manages a device for inspecting a

data, Which is received via the netWork, based on a

lot in each of a plurality of processes,

predetermined assessment standard, and then produces a

Wherein the host does not transmit an instruction to transfer a corresponding lot or transmits an instruction to transfer the lot to a buffer, to a transferring portion connected to the host via netWork in case that a result of assessing a

result of assessing a measured value so as to transmit the

result to the device, Wherein the device provides a display corresponding to the result of assessing the measured value in accordance With the received result of assessing the measured value

measured value of the lot is abnormal While transmitting to the transferring portion an instruction to transfer the corresponding lot and also transmitting to a processing

and a previously registered display standard,

device for a next process an instruction to start process

ing of the corresponding lot in case that the result of assessing the measured value is normal.

15

12. A system of displaying a measurement result in an

inspection process using a network, the system comprising: a device that measures a lot based on a measurement con

dition corresponding to the inspection process so as to

obtain measured data; and a host that intensively controls and manages the device in one or a plurality of steps, the host further comprising:

20

Wherein the device comprises a four color display unit including a ?rst display portion, a second display por tion, a third display portion and a fourth display portion of colors different from each other, and Wherein the four color display unit provides a display cor responding to the result of assessing the measured value and a display shoWing an operating condition of the

device operating or not operating, by lighting up, turning off or ?ashing four color of the four colors display unit. *

*

*

*

*

Method of displaying measurement result in inspection process and ...

Jan 23, 2008 - Primary Examiner * Drew A Dunn. Assistant Examiner * Stephen Cherry. (74) Attorney, Agent, or Firm * DLA Piper LLP (U S). (57). ABSTRACT.

1MB Sizes 1 Downloads 226 Views

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