Roll No. ...................... Total No. of Questions: 08]

[Total No. of Pages: 01

M. Tech. VLSI TECHNOLOGY SUBJECT CODE : VL- 514 Paper ID : [E0724] [Note: Please fillsubject code and paper ill on OMR)

Maximum Marks:

Time: 03 Hours

50

Instruction to Candidates: 1) 2)

Attempt any Five questions. All questions carry equal marks.

Q1) What is etching? Explain wet chemical etching techniques. Q2) What is solid state cjiffusion? Explain.

Q3) Explain high k and low K dielectrics used for ULSI? Q4) What is photolithography? Explain any two photolithography techniques. Q5) Explain chemical vapour depositions techniques used for deposition of polysilicon. Q6) What is the failure rate in metal interconnects? How it can be reduced.

Q7) Describe the masking sequence and process flow for BIPOLAR devices. Q8) List topological design rules.

~~~ J-4063 [8129J

GNDEC M.Tech VL December 2009 VLSI Technology.pdf ...

Page 1 of 60. Bohol Profile. Bohol. Basic Facts. Geographic Location Bohol is nestled securely at the heart of the Central. Visayas Region, between southeast of Cebu and southwest. of Leyte. Located centrally in the Philippine Archipelago, specifically. within north latitude 9030' and 10015' and east longitude. 123040' and ...

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