USO0RE41374E
(19) United States (12) Reissued Patent
(10) Patent Number: US RE41,374 E (45) Date of Reissued Patent: Jun. 15, 2010
Wine et a]. (54) FREQUENCY TUNABLE RESONANT
5,355,181 A
SCANNER AND METHOD OF MAKING
5,451,425 A 5,467,104 A
* 10/1994 8/1995 * 9/1995 * 11/1995
5,488,862 A
*
5,444,565 A
(75) Inventors: David W. Wine, Seattle, WA (US); Mark P. Heisel, Seattle, WA (US); Jon D. Barger, Snohomish, WA (US); Clarence T. Tegreene, Bellevue, WA
*
AshiZakiet al. ........... .. 348/744 359/224 Vig ............. .. 438/322 Furness et al. ............... .. 345/8 Goto .............. ..
2/1996 Neukermans et al.
73/504.02
(Continued) FOREIGN PATENT DOCUMENTS
(Us) (73) Assignee: Microvision, Inc., Redmond, WA (US)
GB
2175705 A
* 12/1986
OTHER PUBLICATIONS
(21) App1.No.: 11/99s,s13
Syms, R.R.A., et al. “Focused Ion Beam Tuning of
(22) Filed:
lniPlaneVibrating Micromechanical Resonators”, Elec tronics Letters, IEE Stevanage, GB, vol. 35, No. 15, Jul. 22,
Nov. 29, 2007
1999. pp. 1277*1278.*
Related U.S. Patent Documents
Reissue of:
(64) Patent No.:
Primary ExamineriQue T Le (74) Attorney, Agent, or FirmiKevin D. Wills
6,653,621
Issued:
Nov. 25, 2003
(57)
Appl. No.:
10/304,724
Filed:
Nov. 25, 2002
ABSTRACT
A MEMs scanning device has a variable resonant frequency.
U.S. Applications:
In one embodiment, the MEMs device includes a torsion
(62)
Division of application No. 09/816,809, ?led on Mar. 23,
arm that supports an oscillatory body. In one embodiment,
2001, now Pat. No. 6,515,278, which is a division of appli cation No. 09/369,674, ?led on Aug. 5, 1999, now Pat. No.
tion of the oscillatory body and selectively removed to estab
6,245,590.
(51)
an array of removable masses are placed on an exposed por
lish the resonant frequency. The material can be removed by
Int. Cl. H01] 3/14
laser ablation, etching, or other processing approaches. In another approach, a migratory material is placed on the tor
(2006.01)
sion arm and selectively stimulated to migrate into the tor (52)
U.S. Cl. ...................................... .. 250/235; 359/199
(58)
Field of Classi?cation Search ................ .. 250/235,
250/559.29, 216; 359/l98i20l, 212*215 See application ?le for complete search history.
sion arm, thereby changing the mechanical properties of the torsion arm. The changed mechanical properties in turn changes the resonant frequency of the torsion arm. In another approach, symmetrically distributed masses are
References Cited
removed or added in response to a measured resonant fre quency to tune the resonant frequency to a desired resonant
U.S. PATENT DOCUMENTS
and the scanning device scans about tWo or more axes, typi
(56)
frequency. A display apparatus includes the scanning device
4,421,381 A
* 12/1983
Uedaet al. ................ .. 359/214
5,097,354
A
*
3/1992
Goto
5,144,184
A
*
9/1992
Greiff . . . . . . . . . .
. ... ...
. . . ..
359/212
. . . ..
310/312
5,165,279 A
* 11/1992 Norling et al.
.. 73/514.14
5,225,923
A
*
7/1993
Montagu
. . . .. 359/199
5,247,384 A
*
9/1993
Inoue et al. ............... .. 359/199
.....
cally in a raster pattern. Various approaches to controlling the frequency responses of the scanning device are described, including active control of MEMs scanners and
passive frequency tuning. 7 Claims, 24 Drawing Sheets
US RE41,374 E Page2
U.S. PATENT DOCUMENTS 5,557,444 A
Melville etal. ........... .. 359/199
5,767,666 A
*
5,914,801 A 5969465 A
* 6/1999 * 10/1999
6/1998 Asada et a1. ................ .. 324/97 Dhuleretal. ............. .. 359/230 Neukermans etal, _____ __ 310/333
*
9/1996
5,629,790 A
*
5/1997 Neukermans et a1.
359/198
5,995,264 A
* 11/1999 Melville
5,629,794 A
*
5/1997
Magel e131, _______ __
359/290
6,016,686 A
*
1/2000
333/197
6,044,705 A
*
4/2000 Neukermansetal
73/504-02
Benninetal. ............... .. 216/22
6,052,197 A
*
4/2000
Drflke ~~~~~~~~~~ --
~356/445
6/2001
W1ne etal. .................. .. 438/52
5,640,133 A
*
6/1997 MacDonaldetal. .
5,645,735 A
*
7/1997
5,648,618 A
*
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6,245,590 B1 *
5,673,139 A
*
9/1997 Johnson .................... .. 359/291
*cited by examiner
.359/198
Thundat ................... .. 73/23.2
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